́ ́ () , 106 , , , 200 ÷ 400 (, 1 ). 1000÷10000 . , .
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XIX XX . 1897 (. ) 1926 (. , . ), 1924 - . 1926 . , , 1930- .
1931 . , 1932 . . . . 1986 , . 1930- , Siemens.
1930- 1940- , . 1960- , .
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- 3D
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- 3D
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- /
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- Carl Zeiss NTS GmbH
- Delong Group
- FEI Company ( Philips Electron Optics)
- FOCUS GmbH
- Hitachi
- JEOL (Japan Electron Optics Laboratory)
- KYKY
- Nion Company
- NT-MDT
- Tescan
- «SELMI»
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, , ( - ).
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Electron microscope (.)
, .
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